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In this paper, the behavior of a valveless, diaphragm-founded, piezoelectric micropump is studied and simulated. The nature of the piezoelectric actuator is a PZT-5H piezo-disk and the diaphragm is made of Silicon dioxide (SiO2). Applying Fluid-Structure Interaction (FSI) approach, the simulation for the valveless micropump is carried out in COMSOL...

By Toufik Barkat, Fatima Yohra Kadid, Mohammed Salah Aggoune, Rachid Abdessemed