In this paper, the behavior of a valveless, diaphragm-founded, piezoelectric micropump is studied and simulated. The nature of the piezoelectric actuator is a PZT-5H piezo-disk and the diaphragm is made of Silicon dioxide (SiO2). Applying Fluid-Structure Interaction (FSI) approach, the simulation for the valveless micropump is carried out in COMSOL 3.5 Multiphysics. Also, electro-structure mating between deformation of a piezoelectric disk due to an applied voltage and resulting displacement of the membrane is considered. From the obtained results, the optimum design required a 0.5 mm membrane and 0.5mm piezo actuator. Numerical simulations are reported to study respectively the effects of the voltage on the diaphragm deflection and the nature of the fluid on the net flow rate.
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